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September 27, 2002
EDA, Manufacturing in Shotgun Wedding
By Gale Morrison - Electronic News
 

 

EDA, Manufacturing in Shotgun Wedding

 

At the annual BACUS gathering on Monday of all those involved in photomask fabrication and use, the trade association Semiconductor Equipment and Materials International (SEMI) plans to get the party started by releasing version 1.0 of a new database interchange format, a would-be successor to GDS-II Stream Format.

It's a complicated engineering debate. The long and short of it is, in the coming age of multimillion-dollar mask sets, the chip data cannot be put at risk by having it in a format that makes it unwieldy. This reality is forcing EDA and their design-engineering customers to sit down and hash it out with fab engineers and all of their photomask and lithography suppliers, because all of them take part in either creating that data, or in using it.

Everybody who touches mask data has been grappling with the explosion in file sizes. A complex 0.13-micron design can easily take 50Gbytes of data. Semiconductor makers usually FTP these files, which design engineering calls "the tape out." The files are in GDS -II Stream format, as they have been since the 1970s.

But at 50Gbytes, an FTP with a dedicated T1 line can take hours and often has to be done in batches, says Roger Sturgeon, who helped write GDS-II in the '70s while at Calma, the proto- Cadence. Sturgeon later co-founded Transcription Enterprises, which is now a subsidiary of Numerical Technologies Inc. Transcription's CATS so-called fracturing tool processes nearly every chip design that's made into a mask. In other words, every chip design that actually gets fabbed.

There is quite a bit of anxiety in breaking up that million-dollar mask data set just so it can FTP to Taipei, Taiwan, successfully before the fracturing step. SEMI formed the IC Design/Photomask Data Path Task Force last year to study this. Tom Grebinski is the group's chairman; he works for Micronic Laser Systems, which supplies the $20 million mask writers. Micronic and Applied Materials' Etec subsidiary compete fiercely in this market. Mask writers live and die on the integrity of the mask data set.

Mentor Graphics, which is the largest EDA tool supplier in the backend of IC design with its Calibre product, has been central to the task force. Calibre group VP Joe Sawicki is overseeing this effort, including Mentor's donation of version 3 of its standard layout format, which is used by every foundry. Calibre competes with Synopsys' Hercules and Venus tools, and Cadence's Virtuoso. All three will need to accommodate the new format, which some are calling NSF, but which Mentor pointedly says does not yet have a name.

Interestingly, Mentor has also developed a fracturing tool to compete with Numerical's CATS tool. Backend design consultant Pallab Chatterjee demonstrated it at the Design Automation Conference (DAC) in New Orleans earlier this year. It's this fact that continues to fuel rumors that Cadence is buying Numerical and thus owning the so-called polygon pushing and fracturing flow, Both companies deny that there are talks of a merger.

Not to be forgotten in this debate is the fact that mask data sets have gotten so large because of the adoption of mask engineering techniques like phase shifting and optical proximity correction. These have allowed chip manufacturers to keep using their 193-nanometer laser lithography systems, and put off the purchase of 157nm systems to the 65nm node. At that time, when device feature sizes should be almost one-third of the width of the laser etching them, the data size will probably be even that much greater.

 



 

 

 

 

 

 
 
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